| 摘要 |
The present invention relates to a plasma source and comprises a bar-shaped core, m (wherein m is a positive integer) number of hubs, and a main coil. The hubs are extended a certain length in a horizontal spiral from the end portion of the core and are arranged symmetrically to each other. The main coil is continuously extended from the end portion of each hub and winds a/m times (wherein a and m are positive integers) in a horizontal spiral, and winds a/m times in a horizontal spiral once again after being horizontally extended a certain length, and then the horizontal extension and a/m-times winding are repeated several times in the main coil. Therefore, the present invention contributes to the uniformity of the process by inducing uniform magnetic and electric fields. |
