SUBSTRATE TRANSFER APPARATUS AND METHOD FOR DRIVING SIDE ROLLER THEREOF

摘要

PURPOSE: A substrate transport apparatus and a method for driving a side roller thereof are provided to improve space restriction according to driving space and layout, by moving the side roller vertically in correspondence to the size of a substrate. CONSTITUTION: Plural side rollers(110) corresponding to the size of a substrate(S) are arranged with different height. The side rollers are installed on both sides in a chamber frame(102) with different height. The side rollers prevent deviation of a movement route of the substrate by supporting both sides of the substrate. The side rollers are arranged in a row along the side of the substrate. The side rollers contact with the side of the substrate during transportation of the substrate. Plural shafts(106) are parallelly arranged in a vertical direction to the movement direction of the substrate in a uniform gap on the chamber frame supporting the side of the substrate. Plural rollers(108) are arranged in a uniform gap along the same direction as the movement direction of the substrate on the shafts.