| 摘要 |
PURPOSE: A heat processing apparatus and a heat processing method for an object to be processed, and a storage medium are provided to improve the accuracy of the device by measuring the temperature of an object to be processed accurately. CONSTITUTION: In a device, a processing vessel(8) accepts an object to be measured having an elastic wave component besides a plurality of objects. A keeping unit(22) maintains the object and an object for measuring the temperature. A gas inlet(40) introduces gas inside the processing vessel. A heating unit(12) heats the object and the object for measuring the temperature. A first conductive member is functioned as a transmission antenna connected to transmitter through the high frequency line. A second conductive member is functioned as a receiver antenna connected to the receiver through the high frequency line. A temperature analysis unit(70) calculates the temperature of the object for measuring temperature based on the electric wave receiving from the receiver antenna. A temperature controller(50) controls the heating unit.
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