| 摘要 |
PURPOSE: A chain transfer agent for the polymerization of antireflective coating, and a polymerization method of an antireflective coating polymer using the chain transfer agent are provided to control the PD (polydispersity) and the molecular weight of an antireflective coating resin and to increase the etching velocity. CONSTITUTION: A chain transfer agent for the polymerization of antireflective coating is represented by the formula 2, wherein R1 and R2 are independently an alkenyl or alkynyl unsaturated hydrocarbon group of the carbon number 2 ~20, or an aromatic hydrocarbon group of the carbon number 6 ~14. Preferably the chain transfer agent is represented by the formula 3. An antireflective coating polymer prepared by the chain transfer agent is represented by the formula 4, wherein R are independently hydrogen, or an alkyl or cycloalkyl group of the carbon number 1 ~ 30 substituted or unsubstituted with F. |
