SUBSTRATE PROCESSING APPARATUS AND METHOD FOR TRANSFERRING SUBSTRATE OF THE SAME

摘要

PURPOSE: A substrate processing apparatus and a method for transferring a substrate thereof are provided to dividedly receive a substrate in a region for receiving a complete processing substrate and a region for receiving a substrate which is not processed, thereby preventing contamination of the complete processing substrate due to the substrate which is not processed. CONSTITUTION: A receiving container contains a plurality of substrates. A processing chamber processes in a substrate. A buffer unit(300) has an input region and a discharging region. The input region receives a substrate to be inputted to the processing chamber from the receiving container. The discharging region is located on the input region and receives a complete processing substrate in the processing chamber. The first transfer member transfers a substrate between the receiving container and the buffer unit.