| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a profile measuring apparatus 1 for sensitively and highly accurately measuring a profile regardless of size from a small-sized measurement object S to a large-sized measurement object S. <P>SOLUTION: The profile measuring apparatus includes: two or more cylindrical Fresnel lens 22 for converting light from a light source 21 into a parallel light, irradiating a measurement object S with the parallel light, and continuously provided in a longitudinal direction; a movement mechanism for relatively moving the cylindrical Fresnel lens 22 and the measurement object S in a direction orthogonal in the longitudinal direction; a condenser lens 31 for condensing the parallel light passing, without being shielded on the measurement object S; a light-receiving part 32 for detecting light, condensed with the condenser lens 31, to be converted into an electrical signal; and a profile recognition part 4 for recognizing a part or the entirety of the profile of the measurement object S, based on the electrical signal from the light-receiving part 32. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
