CARRIER MOBILITY ENHANCED CHANNEL DEVICES AND METHOD OF MANUFACTURE
摘要
<p>An integrated circuit with stress enhanced channels, a design structure and a method of manufacturing the integrated circuit is provided. The method includes forming a dummy gate structure on a substrate and forming a trench in the dummy gate structure. The method further includes filling a portion of the trench with a strain inducing material and filling a remaining portion of the trench with gate material.</p>
申请公布号
WO2009148992(A1)
申请公布日期
2009.12.10
申请号
WO2009US45788
申请日期
2009.06.01
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;YANG, HAINING, S.;CHENG, KANGGUO