| 发明名称 |
Control of carbon nanotube diameter using CVD or PECVD growth |
| 摘要 |
The diameter of carbon nanotubes grown by chemical vapor deposition is controlled independent of the catalyst size by controlling the residence time of reactive gases in the reactor.
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| 申请公布号 |
US7628974(B2) |
申请公布日期 |
2009.12.08 |
| 申请号 |
US20030689675 |
申请日期 |
2003.10.22 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GRILL ALFRED;NEUMAYER DEBORAH;SINGH DINKAR |
| 分类号 |
D01C5/00;C01B31/02;C23C16/26;C23C16/52;C30B25/00;C30B25/10;C30B29/60;D01F9/12;H01J9/02;H01L51/30;H05H1/24 |
主分类号 |
D01C5/00 |
| 代理机构 |
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