| 摘要 |
An examination apparatus that has a simple structure and that is capable of determining the condition inside the apparatus and improving the ease of use of the apparatus when a specimen is changed is provided. The examination apparatus includes a stage on which a specimen is disposed; an optical system configured to form an enlarged or reduced image of the specimen; a cover configured to cover the stage and the optical system; an opening and closing member provided as part of the cover; a detection unit configured to detect whether the opening and closing member is in a closed state or an open state; and a stage driving unit configured to move the state. Only when the detection unit detects that the opening and closing member is open, the stage is moved by the stage driving unit to the outside of the cover through an opening covered by the opening and closing member.
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