ATMOSPHERIC PRESSURE PLASMA GENERATING DEVICE AND ATMOSPHERIC PRESSURE PLASMA DEVICE FOR TREATING THE SURFACE HAVING THE SAME

摘要

PURPOSE: An atmospheric pressure plasma generating apparatus and an atmospheric pressure plasma surface treatment apparatus comprising the same are provided to perform stable and uniform plasma surface treatment, by injecting a plasma gas between a first injection hole and a second injection hole through a number of injection through-holes. CONSTITUTION: A power source electrode(110) has a bottom of flat semicircular shape or elliptic profile shape. A first ground electrode(120) generates plasma in a space separated from the power source electrode by reacting to the power supply electrode. A second ground electrode(130) generates plasma in a space separated from the power source electrode by reacting to the power source electrode. A gas feed port(140) supplies a reaction gas to a space separated between the power source electrode and the second ground electrode. A first injection hole(151) is located in one end of the power source electrode. A second injection hole(152) is located in the other end of the power source electrode.