PHOTOELECTRIC CONVERSION DEVICE AND IMAGING SYSTEM

摘要

<P>PROBLEM TO BE SOLVED: To suppress dark current while reducing connection resistance of a signal wiring layer to a plug. Ž<P>SOLUTION: This photoelectric conversion device includes: a photoelectric conversion part; a shading layer formed above the photoelectric conversion part and shading at least a region of a pixel excluding the photoelectric conversion part; a semiconductor region converting charge generated in the photoelectric conversion part to voltage; a signal wiring layer connected to the semiconductor region or a wiring layer through a plug; a first barrier metal layer arranged along the undersurface of the shading layer; and a second barrier metal layer arranged between the signal wiring layer and the plug along the upper surface or undersurface of the signal wiring layer. The first barrier metal layer is formed of a material low in hydrogen storage capability relative to the second barrier metal layer to suppress dark current in the photoelectric conversion part; and the second barrier metal layer is formed of a material low in specific resistance relative to the first barrier metal layer to reduce connection resistance between the signal wiring layer and the plug. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž