| 摘要 |
<p>Provided are a carrier device which carries an object on a previously-set carrying track with the object held by a carrier section capable of obtaining teaching information relating to a carrying position by normal carrying operation and installed at the leading end of an arm, a position-teaching method, and a sensor jig. A light-transmitting sensor (32) is provided to the sensor jig (30) such that projected line segments of an optical axis (41) and an optical axis (42) to a projection surface intersect with each other and neither the projected line segment of the optical axis (41) nor that of the optical axis (42) is in an X-direction nor Y-direction. When teaching a position, the sensor jig (30) is installed while being gripped by the wafer carrying section (24), thereby detecting target members (51, 52).</p> |
