发明名称 ALUMINUM ALLOY FILM FOR DISPLAY DEVICE, DISPLAY DEVICE AND SPUTTERING TARGET
摘要 PROBLEM TO BE SOLVED: To provide an Al alloy film for a display device, which exhibits a sufficiently low electric resistivity even when subjected to heat treatment at a low temperature, fully reduces contact resistance when directly connected transparent with a pixel electrode, and has excellent corrosion resistance. SOLUTION: Provided is the Al alloy film for a display device, which is directly connected with a transparent electroconductive film on the substrate of a display device, wherein the Al alloy film contains 0.05-0.5 atm.% Co and 0.2-1.0 atm.% Ge and the contents of Co and Ge satisfy relationship of formula (1): [Ge]≥-0.25×[Co]+0.2 wherein [Ge] is the Ge content (atm.%) in the Al alloy film; and [Co] is the Co content (atm.%) in the Al alloy film. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009280911(A) 申请公布日期 2009.12.03
申请号 JP20090105478 申请日期 2009.04.23
申请人 KOBE STEEL LTD 发明人 NAKAI JUNICHI;NANBU AKIRA;GOTO YASUSHI;OKUNO HIROYUKI;MIKI AYA
分类号 C22C21/00;C23C14/34;G02F1/1368;H01L21/28;H01L21/285;H01L21/3205;H01L21/768;H01L23/52;H01L29/786 主分类号 C22C21/00
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