Al ALLOY FILM FOR DISPLAY DEVICE, DISPLAY DEVICE, AND SPUTTERING TARGET

摘要

PROBLEM TO BE SOLVED: To provide an Al alloy film for a display device, which has satisfactorily low electric resistance even after heat treatment of low temperature and whose contact resistance with a directly connected transparent electrode is satisfactorily reduced and which has excellent corrosion resistance and heat resistance. SOLUTION: The Al alloy film directly connected to a transparent conductive film on a substrate of the display device has 0.05 to 0.5 atom% Ni, 0.4 to 1.5 atom% Ge, 0.05 to 0.3 atom% at least one element selected from a rare earth element group in total and ≤1.7 atom% sum total of Ni and Ge. COPYRIGHT: (C)2010,JPO&INPIT