| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique of improving the linearity precision of connection rails. SOLUTION: In a base stage 10, auxiliary mounting stages 12a to 12d to be attached to a main mounting stage 11 have an vertical adjustment device 6, and the auxiliary mounting stages 12a to 12d are fixed to the main mounting stage 11. Main rails 13<SB>1</SB>and 13<SB>2</SB>on the main mounting stage 11 are connected with auxiliary rails 14a to 14d on the auxiliary mounting stages 12a to 12d. Before formation of connection rails 8<SB>1</SB>and 8<SB>2</SB>, both ends of the connection rails 8<SB>1</SB>and 8<SB>2</SB>are bent upward by the vertical adjustment device 6. When ends of the auxiliary mounting stages 12a to 12d are bent downward by self-weight, the connection rails 8<SB>1</SB>and 8<SB>2</SB>become linear. If ends of the auxiliary rails 14a to 14d are laid on the main mounting stage 11, there occurs no level difference in the connection part between the main rails 13<SB>1</SB>and 13<SB>2</SB>. COPYRIGHT: (C)2010,JPO&INPIT
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