发明名称 |
SCANNING CHARGED PARTICLE BEAMS |
摘要 |
Methods are disclosed that include exposing, in direct succession, portions of a surface of a sample to a charged particle beam, the portions of the surface of the sample forming a row in a first direction, the charged particle beam having an average spot size f at the surface of the sample, each portion being spaced from its neighboring portions by a distance of at least d in the first direction, and a ratio d/f being 2 or more. |
申请公布号 |
WO2009077450(A3) |
申请公布日期 |
2009.12.03 |
申请号 |
WO2008EP67419 |
申请日期 |
2008.12.12 |
申请人 |
CARL ZEISS NTS GMBH;PREIKSZAS, DIRK;STEIGERWALD, MICHAEL;ACKERMANN, JOERG |
发明人 |
PREIKSZAS, DIRK;STEIGERWALD, MICHAEL;ACKERMANN, JOERG |
分类号 |
H01J37/28;H01J37/02;H01J37/302;H01J37/317 |
主分类号 |
H01J37/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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