| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To suppress deterioration of positioning accuracy of a machining beam or machining accuracy of an article caused by inclination of a mirror. <P>SOLUTION: The galvano-device includes a mirror 2, a motor 1 for rotating the mirror 2, a detector DT1 for detecting the inclination of a region 6 to be detected of the mirror 2, and a processor 50 by which inclination quantity of the mirror 2 in a rotary angle is obtained on the basis of the inclination of the target region 6 detected by the detector DT1 and the rotary angle of the mirror 2. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
