| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ferroelectric film laminated body which is few in crystal-defect and has good characteristics. <P>SOLUTION: A ferroelectric film laminated body 100 includes a first electrode 102, a second electrode 103, and a PZT ferroelectric film 101 formed on the first electrode 102. In the ferroelectric film 101, Nb replaces Ti composition by 2.5 mol% or more but 40 mol% or less, and the first electrode 102 and the second electrode 103 are made of one of platinum group metals such as Pt, Ir, Ru or a composite material mainly composed of the platinum group metals. The electrode 102 does not include almost any oxygen that diffuses from the ferroelectric film. <P>COPYRIGHT: (C)2010,JPO&INPIT |
