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发明名称
Sputtertarget
摘要
申请公布号
DE102009010496(A8)
申请公布日期
2009.12.03
申请号
DE200910010496
申请日期
2009.02.25
申请人
KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL LTD.);KOBELCO RESEARCH INSTITUTE INC.
发明人
FUJII, HIDEO;MATSUZAKI, HITOSHI
分类号
C23C14/34;C22C28/00
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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