Method for manufacturing a piezoelectric actuator

摘要

A method for manufacturing a piezoelectric actuator, the method comprising: providing a plurality of sheets, each sheet (158) comprising a high permittivity region (154) and at least two low permittivity regions (156) adjacent to the high permittivity region (154); applying at least one conductive region (160) to each one of two or more of the sheets (158) to overly the high permittivity region (154) and to leave exposed at least one low permittivity region (156); and stacking the sheets (158) to form an actuator stack (168), wherein the or each conductive region (160) on each sheet (158) is offset with respect to a conductive region (160) on a different sheet (158) within the actuator stack (168).