| 摘要 |
precision instrument making, namely actuators of micromanipulators, possibly for relatively large motion of microinstrument and its precise positioning. SUBSTANCE: actuator includes piezopump having piezoelement, two elastic construction members, two ducts of piezopump provided with two sleeves and two valves arranged in them. Actuator also includes cylinder with piston and working liquid. Piezoelement is deformable and movable one, it may be adjusted by means of screw. Each valve is in the form of piezocrystal. Ducts are connected with cavity of cylinder. Clamp is secured to piston. Elastic members of construction may be in the form of deformable cones, deformable inner surfaces of cones or cover plates on deformable and moving member of piezopump. Deformable and moving member of construction may be in the form of piezocrystal or lever joined with piezocrystal. EFFECT: increased loading capacity, enhanced precision of positioning, increased useful life period. 6 cl, 5 dwg
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