| 摘要 |
PURPOSE: To find a common visual field area which is to be optimum with respect to any measurement mark. CONSTITUTION: This optical position deviation detector is constituted of a lighting optical system 10, an image-forming optical system 20 for forming the image of the measurement mark, a CCD camera 30 for photographing the image of the measurement mark, an image processor 35 for processing image signals and measuring the overlapping positional deviation of a resist mark to a base mark and a visual field area adjusting mechanism for adjusting the visual field area. The visual field area adjusting mechanism is constituted of a visual field diaphragm 14 provided in the lighting optical system 10, a visual field diaphragm position adjusting mechanism 40 for adjusting the visual field diaphragm and an image pickup position adjusting mechanism 45 for adjusting the position of the CCD camera 30, and the visual field diaphragm 14 and the image pickup surface of the CCD camera and disposed at optically conjugate positions.
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