发明名称 Semiconductor device, semiconductor integrated circuit and bump resistance measurement method
摘要 The present invention provides a semiconductor device, including: a first semiconductor chip, and a second semiconductor chip connected to the first semiconductor chip through a plurality of bumps having not only a number of main bumps necessary for operation between the chips but also a predetermined number of measurement and control input bumps. Each of the first and second chips includes a plurality of measurement path switches individually connected to the main bumps, a plurality of current path switches connected to connecting points between the main bumps and the measurement path switches, and a control circuit for the measurement path switches, the first semiconductor chip further including a plurality of measurement and control terminals for inputting a control signal of the control circuit and supplying fixed current to be supplied to the current path switches and then measuring the voltage at the connecting points.
申请公布号 US7626411(B2) 申请公布日期 2009.12.01
申请号 US20070893573 申请日期 2007.08.16
申请人 SONY CORPORATION 发明人 SHIMIZUME KAZUTOSHI;YAMADA TAKAAKI
分类号 G01R31/26;H01L29/40 主分类号 G01R31/26
代理机构 代理人
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