| 摘要 |
PROBLEM TO BE SOLVED: To improve the spoiled coating uniformity since the flow rate reduction and holding of coating liquid take place in a manifold end distant from a feed port, resulting in decreases in discharge amount at a coating width end and in liquid concentration caused by settlement of the coating liquid in the manifold in conventional methods where a coating liquid is spread in a width direction after liquid supply and is extruded from slits. SOLUTION: The uniform coating may be achieved in a coating width direction by elastically deforming the manifold in the entire coating width and delivering a coating liquid. COPYRIGHT: (C)2010,JPO&INPIT
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