发明名称 LIGHT IRRADIATION APPARATUS
摘要 <p>PURPOSE: A light irradiating device is provided to perform partial irradiation while irradiating the ultraviolet ray by opening an irradiation hole when a slide unit receiving an object crosses the opening hole. CONSTITUTION: A light irradiation apparatus(10) includes a housing(14), a slide unit(15), a retaining unit(16), an opening/closing unit(17), and a pressurizing unit. The housing includes a light irradiation unit and an irradiation hole to irradiate the light. The slide unit relatively moves to the direction cross the irradiation hole. The slide unit includes a receiving hole to receive the object. The retaining unit retains the object. The retaining unit closes the receiving hole by engaging with the slide unit when the object is arranged in the slide unit. The opening/closing unit opens or closes the irradiation hole. The pressurizing unit pressurizes the opening/closing unit to the preset direction.</p>
申请公布号 KR20090122121(A) 申请公布日期 2009.11.26
申请号 KR20090039776 申请日期 2009.05.07
申请人 LINTEC CORPORATION 发明人 TAKEUCHI JUNICHI
分类号 H01L21/301;H01L21/027 主分类号 H01L21/301
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