发明名称 METHOD OF MANUFACTURING ACTING ELECTRODE, ACTING ELECTRODE, AND PHOTOELECTRIC CONVERSION ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an acting electrode capable of manufacturing the acting electrode in which an increase in internal resistance due to the partial presence of an electrolyte when used for a photoelectric conversion element is prevented by a simple method, by eliminating nonuniformity of a surface irregularities of an oxide semiconductor porous layer. <P>SOLUTION: This manufacturing method of the acting electrode includes a process of forming the oxide semiconductor porous layer 21 on a transparent conductive substrate 10 by a lithographic printing method, a process of flattening its upper surface by uniformizing the thickness of the oxide semiconductor porous layer by pressing the upper surface of the oxide semiconductor porous layer by a plate by arranging the plate 60 having a die separable characteristic above the transparent conductive substrate via a spacer 61, a process of drying the oxide semiconductor porous layer in a state of pressing the upper surface of the oxide semiconductor porous layer by the plate, and a process of removing the plate after drying the oxide semiconductor porous layer and baking. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009277626(A) 申请公布日期 2009.11.26
申请号 JP20080130702 申请日期 2008.05.19
申请人 FUJIKURA LTD 发明人 INABA KOICHI;DOI KATSUHIRO
分类号 H01M14/00;H01L31/04 主分类号 H01M14/00
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