| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a calibration jig used for highly accurately performing the calibration of an imaging camera, even when a proofreading mark exists on the rear surface side when viewed from the imaging camera. Ž<P>SOLUTION: The calibration jig C is used for performing calibration of a mask recognition camera 93a, a landing recognition camera 93b and a head recognition camera 65a with each other which are different in position of an imaging surface orthogonal to an optical axis and oppositely arranged. Reference marks Ca are each formed like a plate with a thickness of the separation dimension of two imaging surfaces and are used for performing the calibration of the mask recognition camera 93a and the landing recognition camera 93b, respectively, and the reference marks Ca are configured at the top ends of tapered through-holes tapered when viewed from the side of the mask recognition camera 93a and the landing recognition camera 93b, respectively. Head proofreading marks Cb used for performing the calibration of the head recognition camera 65a are configured at the top ends of tapered through-holes tapered when viewed from the head recognition camera 65a. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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