发明名称 INSULATION FILM FOR CAPACITOR ELEMENT, CAPACITOR ELEMENT AND SEMICONDUCTOR DEVICE
摘要 An insulation film includes niobium, oxygen and a metal element, and the insulation film has a band gap width of larger than 4.2 eV, and at least a portion of the insulation film includes an amorphous structure.
申请公布号 US2009289328(A1) 申请公布日期 2009.11.26
申请号 US20090470873 申请日期 2009.05.22
申请人 ELPIDA MEMORY, INC. 发明人 TANIOKU MASAMI
分类号 H01L29/92;E04B1/76;H01G4/06 主分类号 H01L29/92
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