发明名称 THIN FILM TRANSISTOR
摘要 PROBLEM TO BE SOLVED: To provide a thin film transistor having high carrier mobility, high response speed, high robustness and high heat resistance. SOLUTION: This thin film transistor includes: a source electrode; a drain electrode provided separately from the source electrode; a semiconductor layer electrically connected to the source electrode and the drain electrode; an insulating layer; and a gate electrode provided in a state insulated from the semiconductor layer, the source electrode and the drain electrode by the insulating layer. At least any one of the source electrode, the drain electrode and the gate electrode includes a metallic carbon nanotube structure. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009278113(A) 申请公布日期 2009.11.26
申请号 JP20090117609 申请日期 2009.05.14
申请人 QINGHUA UNIV;HON HAI PRECISION INDUSTRY CO LTD 发明人 JIANG KAILI;LI QUNQING;FAN FENG-YAN
分类号 H01L29/786;C01B31/02;H01L21/28;H01L29/06;H01L51/05;H01L51/30 主分类号 H01L29/786
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