发明名称 CURABLE SILICONE COMPOSITION FOR NEGATIVE PATTERN FORMATION AND PATTERN FORMING METHOD USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a curable silicone composition for negative pattern formation which takes part in crosslinking reaction upon hydrosilylation and cures, and a negative pattern forming method. <P>SOLUTION: The curable silicone composition for negative pattern formation contains the following components (i), (ii) and (iv) or the following components (iii) and (iv); (i) an organopolysiloxane having alkenyl groups, (ii) an organohydrogenpolysiloxane or a hydrosilane compound, (iii) an organopolysiloxane having an alkenyl group and a hydrogen atom, and (iv) a hydrosilylation catalyst component which is the product of reaction of a hydrosilylation catalyst with an onium salt represented by (R<SP>1</SP>R<SP>2</SP>R<SP>3</SP>R<SP>4</SP>P)<SP>+</SP>Y<SP>-</SP>or (R<SP>1</SP>R<SP>2</SP>R<SP>3</SP>R<SP>4</SP>N)<SP>+</SP>Y<SP>-</SP>. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009276777(A) 申请公布日期 2009.11.26
申请号 JP20090188517 申请日期 2009.08.17
申请人 DOW CORNING CORP 发明人 HARIHARA YUKINARI;TACHIKAWA MAMORU;OGAWA TAKUYA;TAKEUCHI KASUMI
分类号 G03F7/075;G03F7/004;G03F7/38;G03F7/40;H01L21/027 主分类号 G03F7/075
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