| 摘要 |
Structures and methods are provided for forming substrates having surface coatings thereon. In one aspect, a structure is provided including a substrate, a surface coating formed on the surface of the substrate, wherein the surface coating comprises a monolayer of dielectric particles, and a dielectric layer having a thickness of less than a height of the dielectric particles. In another aspect of the invention, a method is provided for processing a substrate including providing a substrate having a surface, exposing a solution comprising dielectric particles to the substrate surface, forming a monolayer of dielectric particles from the solution on the substrate surface, depositing a dielectric layer on the substrate surface at a thickness of less than the height of the dielectric particles, and exposing the substrate to a thermal process. |
