| 摘要 |
PROBLEM TO BE SOLVED: To provide a segmentation-type cylindrical heater, a heat insulating material and the like being incidental to the heater and a single crystal pulling apparatus by a CZ method using the heater, the heat insulating material and the like. SOLUTION: (1) The heater 1 is a cylindrical heater (heat emitting body) to heat a raw material supplied in a crucible and to hold a molten state and is divided in a circumferential direction. The heat insulating material and a protective cylinder for the heat insulating material are similarly divided in the circumferential direction. The heater can be large-sized and the handling of the heater, the heat insulating material and the like can be easily performed. (2) In the single crystal pulling apparatus having the heater arranged to be concentric at the outside of the crucible, to heat the raw material supplied in the crucible and to hold the molten state and being assembled with the heater, the heat insulating material and the like, the single crystal is grown from the molten liquid in the crucible by the CZ method. COPYRIGHT: (C)2010,JPO&INPIT
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