发明名称 STACKED MICROPHONE WITH SIGNAL PROCESSING BLOCK AND METHOD FOR MANUFACTURING SAME
摘要 <p>The present invention relates to a microphone and method for manufacturing same, and more particularly to a stacked microphone in which a microphone is stacked on a semiconductor substrate on which a signal processing block is formed through a CMOS process, and a manufacturing method for same. The stacked microphone having a signal processing block and the method for manufacturing same according to the present invention are advantageous in that the signal generated from the microphone by the vibration of a diaphragm is processed into a desired form by the signal processing block arranged beneath the microphone to improve resistance against noises from the outside as compared to the case wherein a microphone and a signal processor are arranged separately. In addition, the signal can be output into a desired form even without using a separate signal processor. Further, the invention is advantageous in that the manufacturing cost and the size of the microphone can be reduced by using a CMOS process.</p>
申请公布号 WO2009107940(A3) 申请公布日期 2009.11.26
申请号 WO2009KR00695 申请日期 2009.02.13
申请人 SILICONFILE TECHNOLOGIES INC.;LEE, BYOUNG SU 发明人 LEE, BYOUNG SU
分类号 H04R19/04 主分类号 H04R19/04
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