| 摘要 |
PROBLEM TO BE SOLVED: To provide an image acquiring method enabling to acquire a plurality of cross section images where cross sections and cross sections to be observed are arranged at predetermined positions. SOLUTION: The image acquiring method includes a cross section image pickup step S52 which follows a mark image pick-up step S42 of picking up a reference mark image while EB-scanning another region than the cross section to be observed, a drift amount calculating step S44 of calculating a current SEM drift amount at a predetermined time while comparing the picked-up reference mark image with a reference mark reference image, and an offset amount calculating step S46 for calculating the offset amount of the current cross section to be observed at a predetermined time. In the cross section image pick-up step S52, the EB scanned region at a predetermined time is corrected in accordance with the SEM drift amount and the offset amount and then the cross section image is picked up. COPYRIGHT: (C)2010,JPO&INPIT
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