| 摘要 |
PROBLEM TO BE SOLVED: To provide a photocurrent estimation method for estimating photocurrent generated in case of irradiating UV light having a predetermined wavelength and intensity to a semiconductor UV sensor, without actual irradiation of UV light. SOLUTION: The photocurrent estimation method includes a resistive element formation process (S1) forming a resistive element next to a PN junction light-receiving region of a semiconductor UV sensor, a resistance value measurement process measuring a resistance value of the resistive element, a film thickness calculation process calculating a film thickness of the PN light-receiving region according to a measurement result in the resistance value measurement process, and a photocurrent estimation process (S4) estimating quantity of the photocurrent that may occur in case of incidence of UV light having a predetermined wavelength and intensity to the semiconductor UV sensor according to a calculation result of the film thickness calculation process. COPYRIGHT: (C)2010,JPO&INPIT
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