发明名称 SEMICONDUCTOR DEVICE, ELECTRONIC EQUIPMENT EQUIPPED THEREWITH AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device where inconvenience such as a crack of a solder bump due to a void is prevented and reliability as the device can be improved by reducing influence of the void having possibility to generate or grow the crack, in a vicinity of a bonding interface between the solder bump and a re-wiring layer, and to provide electronic equipment having the semiconductor device and a manufacturing method of the semiconductor device. SOLUTION: In WLCSP, an insulating resin post 33 is formed on a surface of a semiconductor wafer 1. A recess 34 whose height D is not less than 50% of height H of the resin post 33 is formed on the upper face of the resin post 33. The first re-wiring layer 38 is formed on the recess 34. The solder bump 36 is formed on the first re-wiring layer 38. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006228940(A) 申请公布日期 2006.08.31
申请号 JP20050040429 申请日期 2005.02.17
申请人 FUJIKURA LTD 发明人 MUNAKATA KOJI
分类号 H01L21/60 主分类号 H01L21/60
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