| 摘要 |
A linear motor for giving thrust to a movable unit capable of linearly moving freely in one direction with respect to a stator, comprising a plurality of permanent magnets arranged on the base side by lining up a positive pole and a negative pole in the one direction; and a plurality of flat shaped coils arranged along the arrangement direction of permanent magnets and fixed as armatures to said movable unit side so as to face the permanent magnets by leaving an electromagnetic gap; wherein a coil fixed surface on the stage side is provided a recessed portion for defining an air gap between the coil fixed surface and said coils.
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