发明名称 Wafer processing including dicing
摘要 Methods for processing semiconductor wafers are described herein. One embodiment includes removing portions of a first side of the semiconductor wafer to form a number of trenches of a particular depth in rows and columns. The method further includes forming a passivation layer on side walls of the number of trenches. The method also includes cutting a second side of the semiconductor wafer in rows and columns aligned with the number of trenches such that the semiconductor wafer singulates into a number of dice.
申请公布号 US7622365(B2) 申请公布日期 2009.11.24
申请号 US20080025623 申请日期 2008.02.04
申请人 MICRON TECHNOLOGY, INC. 发明人 PAREKH KUNAL R.
分类号 H01L21/46;H01L21/301;H01L21/78 主分类号 H01L21/46
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