INSPECTION METHOD OF A PROBE CARD

摘要

PURPOSE: An inspection method of a probe card is provided to measure surface flatness accurately by strong mother board information. CONSTITUTION: An inspection method of a probe card is comprised of the steps: receiving mother board information; mapping a channel of the mother board through a extended channel if the mother board use over 2600 channels and registering the mother board information to a database(S1002); registering a probe card data by using a probe card data, mapping data, test parameter after Inputting a test parameter(S1004); and calculating surface flatness of a probe card by using the information of a probe pin which is contacted with a test chuck after inputting a test setting value.