| 摘要 |
PURPOSE: An optical inspection module is provided to prevent the image quality deterioration of a CCD(Charge Coupled Device) because an image optical path is no need to transmit a semi-transmission unit. CONSTITUTION: An optical inspection module(30) is composed of a light source(34), a semi-transmission unit(36), a reflective unit(38), and an image capture unit(40). The light source investigates the light ray. The semi-transmission unit is arranged in a first straight path(42). The reflective unit is arranged to escape from the first straight path. The reflective unit is formed to be separated from the semi-transmission unit. The image capture unit is arranged with the reflective unit in a second straight path(44). After an image optical path reaches the plate through the semi-transmission unit, the image optical path is reflected by the plate and faces to the semi-transmission unit. The image optical path is reflected to the reflective unit through the semi-transmission unit, and reaches the image capture unit through the reflective unit.
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