发明名称 |
METHOD OF FORMING A PHASE CHANGEABLE STRUCTURE |
摘要 |
The present invention relates to a method of forming a phase changeable structure wherein an upper electrode is formed on a phase changeable layer. A material including fluorine can be provided to the phase changeable layer and the upper electrode. The phase changeable layer can be etched to form a phase changeable pattern. Oxygen plasma or water vapor plasma can then be provided to the upper electrode and the phase changeable pattern.
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申请公布号 |
US2009283741(A1) |
申请公布日期 |
2009.11.19 |
申请号 |
US20090509048 |
申请日期 |
2009.07.24 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LIM YOUNG-SOO;BAE JUN-SOO |
分类号 |
H01L47/00 |
主分类号 |
H01L47/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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