发明名称 MASK MEMBER PASTING APPARATUS, AND COATING SYSTEM
摘要 <P>PROBLEM TO BE SOLVED: To prevent an adhesive layer from overflowing into an applying region due to crush up at adhering a mask member, in a mask member pasting apparatus pasting the mask member through the adhesive layer for preventing adhesion of a fluid material in a non-applying region on a substrate with a fluid material applied. Ž<P>SOLUTION: In the mask member pasting apparatus, by pressing the mask member 12 to the non-applying region 92 of the substrate 9, the mask member 12 is pasted on the substrate 9 through an adhesive layer 11 formed on the non-applying region 92. Since the adhesive layer 11 contains an adhesive material 111 and granular spacers 112, a height of the mask member 12 from a main surface 90 of the substrate 9 becomes nearly equal to a diameter of the spacers 112. And also, the adhesive layer 11 is prevented from overflowing into an applying region 91 due to crush up upon pasting the mask member 12. As a result, organic EL solution can be applied on the applying region 91 of the substrate 9 in high precision. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009272208(A) 申请公布日期 2009.11.19
申请号 JP20080123236 申请日期 2008.05.09
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 KAWAGOE MICHIFUMI;MASUICHI MIKIO;MATSUKA TAKESHI;TAKAMURA YUKIHIRO;SAGARA SHUICHI
分类号 H05B33/10;B05C5/00;B05C21/00;H01L51/50;H05B33/04 主分类号 H05B33/10
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