| 摘要 |
A gas diluter which comprises: dilution chambers in which a first gas is mixed with a second gas to reduce the concentration of the first gas; connecting passages with which the dilution chambers are connected serially; branched passages through which the first gas is distributed to the dilution chambers, an introduction passage through which the second gas is introduced into the dilution chamber, which is located at one end of the serially connected dilution chambers; and a discharge opening through which the gas obtained by mixing the first gas with the second gas is discharged from the dilution chamber, which is located at the other end of the serially connected dilution chambers.
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