GALVANOSCANNER APPARATUS AND LASER MACHINING APPARATUS EQUIPPED WITH GALVANOSCANNER APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a galvanoscanner apparatus in which a mirror which reflects a light beam such as laser light is positioned accurately at a high speed, and to provide a laser machining apparatus equipped with the galvanoscanner apparatus.

SOLUTION: The galvanoscanner apparatus comprises: a mirror 2 supported on a turning shaft 5; an angle detection means composed of an encoder plate 7 supported on the turning shaft 5 and a sensor head 8 fixed on a frame 12b; and a servo control unit which allows the mirror 2 to follow a target angular value by using an angular detection value 14 detected by the angular detection means, wherein a strain sensor 10 is provided on the mirror 2 to detect the deformation of the mirror 2 and the mirror 2 is positioned on the basis of the output signal 20 of the strain sensor 10 and output signal 14 of the angular detection means.

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