| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertical heat treatment apparatus which minimizes thermal deformation of a reaction tube caused by annealing, and to prevent occurrence of haze on the surface of a wafer by leakage. SOLUTION: A vertical heat treatment apparatus includes at least a reaction tube made of quartz, a boat for heat treatment which is arranged in the reaction tube in order to hold a substrate to be treated, and a heater for heating the substrate to be treated, wherein the reaction tube includes a tubular body portion and a ceiling portion, and a support for supporting the reaction tube and limiting thermal deformation thereof is arranged on the inside of the reaction tube. COPYRIGHT: (C)2010,JPO&INPIT |
