| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing system which stably operates external connected terminal apparatuses even if an apparatus model is changed. SOLUTION: An apparatus information storage section 300 stores a data file wherein the apparatus information of a substrate processor 10 is described. A comparison section 306 compares the apparatus information stored in the apparatus information storage section 300 with that input from a format conversion section 304, and outputs the comparison result to a control section 308. The control section 308 receives the comparison result of the comparison section 306, and when the contents of two pieces of information for comparison are different, the apparatus information stored in the apparatus information storage section 300 is updated to that input from the format conversion section 304 by an update section 310, and then a notice of the change of the apparatus information is informed to a terminal apparatus 2 through a notification section 312. COPYRIGHT: (C)2010,JPO&INPIT |
