| 摘要 |
PROBLEM TO BE SOLVED: To provide a driving device for an air spindle which can prevent the generation of vibrations, noises, etc. and can keep a high speed and highly accurate rotation. SOLUTION: The driving device 1 for the air spindle comprises a rotary spindle 3, a first plate member 4, and a second plate member 5, which are supported by air bearings 6A to 6C in a floating state from a body 2, a first air supply passage 2g penetrating from the outer surface of the body to a hollow portion, second air supply passages 2a to 2c penetrating from the outer surface of the body to each of the respective air bearings 6, first air discharge passages 2d to 2f penetrating from the respective air bearings 6A to 6C to the outer surface of the body, groove portions 3a provided on the outer surface of the body, third air supply passages 3b, 3c penetrating from the bottom portions of the groove portions to one end of the rotary spindle, and second air discharge passages 4a, 4b provided on the first plate member so as to communicate with the third air supply passages. Air penetrates the first air supply passage, the groove portions, the third air supply passages, and the second air discharge passages in this order, and then gushes outward. As a result, the first plate member, etc. rotate. COPYRIGHT: (C)2008,JPO&INPIT
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