| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved vacuum pump in which at least one rotor shaft 12 has a rotor section 14 with a rotor 16, a bearing section 18 with a bearing 20, and a shaft sealing device 22 that is axially provided between the rotor and bearing sections 14 and 18, and in which the shaft sealing device includes a gas seal 32 at the axial direction rotor side and an oil seal 34 on the axial direction bearing side. SOLUTION: The shaft sealing device 22 provided between the gas seal 32 and oil seal 34 includes a separation chamber 36 which surrounds the rotor shaft 12 and is ventilated by one or more separation chamber-ventilating ducts 60 and 62. A blocking gas source is connected to the separation chamber-ventilating duct, and the blocking gas is introduced into the separation chamber 36 under excessive pressure through the separation chamber-ventilating duct. COPYRIGHT: (C)2010,JPO&INPIT
|
