发明名称 INJECTOR
摘要 PROBLEM TO BE SOLVED: To provide an injector capable of evacuating air in a short time when a liquid resin is injected. SOLUTION: The injector includes a sealing member which holds a pair of wafers, facing each other and stacked at intervals, while sealing their peripheral edges airtight, being equipped with a flow-in part for causing a liquid resin to flow into the space sandwiched between the pair of wafers and an exhaust part which allows the space to communicate with a negative pressure source. It also comprises a support part for supporting the sealing member for free tilting. The pair of wafers are tilted by tilting the sealing member, and the liquid resin is injected into the space at an arbitrary tilted position, including horizontal and vertical posture of the pair of wafers. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009272381(A) 申请公布日期 2009.11.19
申请号 JP20080119851 申请日期 2008.05.01
申请人 NIKON CORP 发明人 KATAGIRI MEGUMI
分类号 H01L21/02 主分类号 H01L21/02
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