| 发明名称 |
SILICA-ON-SILICON WAVEGUIDES AND RELATED FABRICATION METHODS |
| 摘要 |
True time delay silica waveguides and related fabrication methods are disclosed. Also disclosed are true time delay silica waveguides comprising wedged silica structures.
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| 申请公布号 |
US2009285542(A1) |
申请公布日期 |
2009.11.19 |
| 申请号 |
US20090436935 |
申请日期 |
2009.05.07 |
| 申请人 |
MARTIN ARMANI ANDREA;PAINTER OSKAR;VAHALA KERRY |
发明人 |
MARTIN ARMANI ANDREA;PAINTER OSKAR;VAHALA KERRY |
| 分类号 |
G02B6/10;H01L21/00 |
主分类号 |
G02B6/10 |
| 代理机构 |
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